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RR9: Coupled MEMS resonant sensors exploiting the mode-localization effect for the detection of VOCs

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RR9: Coupled MEMS resonant sensors exploiting the mode-localization effect for the detection of VOCs

Project Title: Coupled MEMS resonant sensors exploiting the mode-localization effect for the detection of VOCs (WP5)

Host Institution: KU Leuven

Country: Belgium

Supervisors: Prof. M. Kraft (KU Leuven); Secondary Supervisors: Prof. R. Adelung (CAU), T. Dieryckx (Voxdale)

Objectives:

  • Design, fabricate and test novel MOF-functionalised resonators for gravimetric VOC sensing.
  • To investigate and employ this approach for gas sensing applications.
  • To demonstrate the first coupled resonator based on this approach.

Short Description of Work & Expected Results:

  • Design study (using Comsol and Coventorware) of a coupled resonator with thermal actuation and piezoresistive sensing. Fabricate several prototypes in the KU Leuven Nanocentre using a fabrication process based on DRIE of SOI wafers.
  • Construction of suitable interface circuits with off-the-shelf components.
  • Coating of the resonators with selected MOFs supplied by RR3 or RR11.

Planned secondment(s):

  • Host: CAU, Prof. R. Adelung, Timing: year 2, Length: 6 months, Topic: Resistive sensor design study and comparison with MEMS
  • Host: Voxdale, T. Dieryckx, Timing: year 3, Length 2-3 months, Topic: integration of sensors into modules suitable for real-world testing and/or the creation of an interface for data collection.

Enrolment in Doctoral degree(s): KU Leuven & CAU

Candidate requirements: 

  • The ideal candidate should have a background and Master degree in micro- and nanosystems, electrical or mechanical engineering, applied physics, material science or a related discipline. Experience in micro-fabrication and working in a cleanroom is desirable.

Recruited researcher: Divya Rajagopal